A High Throughput Study of both Compositionally Graded and Homogeneous Fe-Pt Thin Films

Autor: Yuan Hong, Isabelle de Moraes, Gabriel Gomez Eslava, Stéphane Grenier, Edith Bellet-Amalric, Andre Dias, Marlio Bonfim, Laurent Ranno, Thibaut Devillers, Nora M. Dempsey
Přispěvatelé: Micro et NanoMagnétisme (NEEL - MNM), Institut Néel (NEEL), Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP ), Université Grenoble Alpes (UGA), Matériaux, Rayonnements, Structure (NEEL - MRS), PHotonique, ELectronique et Ingénierie QuantiqueS (PHELIQS), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA), Universidade Federal do Paraná (UFPR), ANR-16-CE09-0019,SHAMAN,Nanocomposites magnétique de type doux-dans-dur(2016)
Rok vydání: 2021
Předmět:
Zdroj: Journal of Materials Research and Technology
Journal of Materials Research and Technology, 2022, 18, pp.1245-1255. ⟨10.1016/j.jmrt.2022.03.055⟩
ISSN: 2238-7854
2214-0697
DOI: 10.48550/arxiv.2111.00366
Popis: Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the variation in film composition across the substrate, as a function of the size of the Pt piece. A scanning polar Magneto-Optical-Kerr-Effect system was used to probe the influence of composition and post-deposition annealing conditions (temperature and time) on coercivity. In this way the maximum coercivity achievable for the sputtering system used could be established in a high throughput fashion. The evolution in coercivity with composition was correlated with the formation of L10 FePt and changes in its lattice parameters, as determined by scanning X-ray diffraction. High throughput coercivity mapping was then carried out on homogeneous Fe-Pt thin films of different composition treated to different annealing conditions. This study serves as a step towards the integration of coercive FePt films into collectively fabricated devices.
Databáze: OpenAIRE
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