Thermo optical coefficient of tin-oxide films measured by ellipsometry
| Autor: | Davor Ristić, Mile Ivanda, Anna Lukowiak, Roberta Ramponi, Sriram Guddala, G. C. Righini, Mariano Ferrari, G. Alombert Goget, A. Chiappini |
|---|---|
| Přispěvatelé: | Institut Lumière Matière [Villeurbanne] (ILM), Centre National de la Recherche Scientifique (CNRS)-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon, Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Materials science
Silicon Annealing (metallurgy) Physics::Optics General Physics and Astronomy chemistry.chemical_element Optical coefficient 02 engineering and technology SnO2 Ellipsometry Thermo-optic coefficient 01 natural sciences Refractive index Silica Thin film structure 010309 optics Condensed Matter::Materials Science [SPI]Engineering Sciences [physics] Optics 0103 physical sciences [CHIM]Chemical Sciences Thin film [PHYS]Physics [physics] business.industry Wide-bandgap semiconductor Physics::Classical Physics 021001 nanoscience & nanotechnology Tin oxide Wavelength chemistry Optoelectronics 0210 nano-technology business |
| Zdroj: | Journal of Applied Physics Journal of Applied Physics, American Institute of Physics, 2015, 118, pp.215306. ⟨10.1063/1.4937146⟩ Journal of applied physics 118 (2015): 215306-1–215306-5. doi:10.1063/1.4937146 info:cnr-pdr/source/autori:Ristic D.; Guddala S.; Chiappini A.; Alombert Goget G.; Lukowiak A.; Ramponi R.; Righini G.C.; Ivanda M.; Ferrari M./titolo:Thermo optical coefficient of tin-oxide films measured by ellipsometry/doi:10.1063%2F1.4937146/rivista:Journal of applied physics/anno:2015/pagina_da:215306-1/pagina_a:215306-5/intervallo_pagine:215306-1–215306-5/volume:118 |
| ISSN: | 0021-8979 1089-7550 |
| DOI: | 10.1063/1.4937146 |
| Popis: | The thermo-optic coefficient of tin-oxide thin films on silicon substrates was measured using fixed wavelength ellipsometry. The applicability of ellipsometry for these measurements is discussed with special considerations to the problem of measurement of the thermo-optic coefficient of materials with very low values of the thermo-optic coefficient ( |
| Databáze: | OpenAIRE |
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