Autor:	Koitzsch, Matthias, Honold, Alfred
Přispěvatelé:	Publica
Rok vydání:	2011
DOI:	10.24406/publica-fhg-227005
Popis:	This paper presents the evaluation of economic effects due to the implementation of virtual metrology (VM) algorithms into the IT infrastructure of IC manufacturers factories, providing the basis for assessing the investment into VM. The basic assumptions for the calculations are explained. Based on the scenario of implementing VM into plasma etchers of a model fab, results of benefit and cost calculation are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36bcacbb4da045040798bc8bb68de701 Zobrazit plný text záznamu