Step and Repeat Ultraviolet Nanoimprinting under Pentafluoropropane Gas Ambient

Autor:	Kei Kobayashi, Hiroshi Hiroshima, Katsuhiko Tone, Shinji Matsui, Masaru Nakagawa, Shu Kaneko, Shuso Iyoshi, Makoto Okada, Yuichi Haruyama, Tetsuya Katase
Rok vydání:	2012
Předmět:	Materials science Physics and Astronomy (miscellaneous) General Engineering General Physics and Astronomy Nanotechnology medicine.disease_cause Pentafluoropropane Contact angle chemistry.chemical_compound Resist chemistry Mold Monolayer medicine Composite material Layer (electronics) Ultraviolet
Zdroj:	Japanese Journal of Applied Physics. 51:06FJ08
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.51.06fj08
Popis:	In the UV nanoimprinting process an antisticking layer such as fluorinated self-assembled monolayer (F-SAM) is grafted on the mold surface to diminish the demolding impact. These layers are supposed to deteriorate as the imprint steps mount up, resulting in defects in the cured resist layer. In this work, continuous multiple shots of UV nanoimprint were conducted in the air and in pentafluoropropane (PFP) gas environment and demolding forces in every imprint step were determined. The experiments revealed that the demolding forces for the imprint in PFP atmosphere drastically reduced compared with those in the air. Water contact angles of the mold surface were also determined in every 225 imprint steps to observe the degree of degradation of the antisticking layer. It was found that the antisticking layer was less damaged or contaminated in the PFP environment than it was in the air after a certain number of imprint steps.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36413508b66e29e6246c600918e562ed https://doi.org/10.1143/jjap.51.06fj08 Zobrazit plný text záznamu