High-Frequency (>50 MHz) Medical Ultrasound Linear Arrays Fabricated From Micromachined Bulk PZT Materials
| Autor: | Qifa Zhou, Frank T. Djuth, K. Kirk Shung, Changgeng Liu |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Ceramics
Materials science Acoustics and Ultrasonics Sensitivity and Specificity Article Materials Testing Miniaturization Insertion loss Electrical and Electronic Engineering Center frequency Instrumentation Ultrasonography Titanium business.industry Phantoms Imaging Bandwidth (signal processing) Electrical engineering Reproducibility of Results Equipment Design Micro-Electrical-Mechanical Systems Image Enhancement Microarray Analysis Equipment Failure Analysis Surface micromachining Transducer Lead Optoelectronics Ultrasonic sensor Zirconium business Acoustic impedance |
| Popis: | This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 μm/h yielded a good profile (wall) angle (>;83°) and a reasonable processing time for etch depths up to 40 μm (which corresponds to a 50-MHz transducer). A backing layer with an acoustic impedance of 6 MRayl and a front-end polymer matching layer yielded a transducer bandwidth of 40%. The major parameters of the transducer have been characterized. The two-way insertion loss and crosstalk between adjacent channels at the center frequency are 26.5 and -25 dB, respectively. |
| Databáze: | OpenAIRE |
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