Dense Arrays of Uniform Submicron Pores in Silicon and Their Applications
| Autor: | Bahman Delalat, Tobias Kraus, Elmar Kroner, Taryn Guinan, Nicolas H. Voelcker, D. Brodoceanu, Beatriz Prieto-Simón, Roey Elnathan |
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| Přispěvatelé: | Brodoceanu, Daniel, Elnathan, Roey, Prieto, Simón Beatriz, Delalat, Bahman, Guinan, Taryn, Kroner, Elmar, Voelcker, Nicolas H, Kraus, T |
| Rok vydání: | 2015 |
| Předmět: |
Silicon
Materials science Polymers Surface Properties chemistry.chemical_element Nanotechnology Biosensing Techniques Porous silicon law.invention chemistry.chemical_compound antireflective surfaces law General Materials Science Wafer SALDI substrates chemistry.chemical_classification Polymer metal-assisted chemical etching Isotropic etching porous silicon Anti-reflective coating chemistry colloidal lithography Polystyrenes Gold Polystyrene polymer fiber arrays Micropatterning |
| Zdroj: | ACS Applied Materials & Interfaces. 7:1160-1169 |
| ISSN: | 1944-8252 1944-8244 |
| DOI: | 10.1021/am506891d |
| Popis: | We report a versatile particle-based route to dense arrays of parallel submicron pores with high aspect ratio in silicon and explore the application of these arrays in sensors, optics, and polymer micro-patterning.Polystyrene (PS) spheres are convectively assembled on gold-coated silicon wafers and sputter-etched, resulting in well-defined gold disc arrays with excellent long-range order. The gold discs act as catalysts in metal-assisted chemical etching, yielding uniform pores with straight walls, flat bottoms, and high aspect ratio. The resulting pore arrays can be used as robust antireflective surfaces, in biosensing applications, and as templates for polymer replica molding. Refereed/Peer-reviewed |
| Databáze: | OpenAIRE |
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