Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors
| Autor: | Cheng-Xue Yu, Lung-Ming Fu, Kuan-Yu Lin, Chia-Yen Lee |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Technology
Materials science Silicon QH301-705.5 Annealing (metallurgy) QC1-999 chemistry.chemical_element Substrate (electronics) pyroelectric infrared sensor law.invention Responsivity law Etching (microfabrication) etching General Materials Science Biology (General) QD1-999 Instrumentation Fluid Flow and Transfer Processes Microelectromechanical systems business.industry Physics Process Chemistry and Technology General Engineering Engineering (General). Civil engineering (General) Computer Science Applications Pyroelectricity MEMS Chemistry chemistry Optoelectronics TA1-2040 Photolithography business substrate thickness |
| Zdroj: | Applied Sciences, Vol 11, Iss 9074, p 9074 (2021) Applied Sciences Volume 11 Issue 19 |
| ISSN: | 2076-3417 |
| DOI: | 10.3390/app11199074 |
| Popis: | Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors. |
| Databáze: | OpenAIRE |
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