A single-mask thermal displacement sensor in MEMS
| Autor: | B. Krijnen, Johannes Bernardus Charles Engelen, J.W. van Dijk, Léon A. Woldering, Leon Abelmann, R.P. Hogervorst, Dannis Michel Brouwer, Herman Soemers |
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| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Materials science Heating element business.industry Mechanical Engineering Lumped capacitance model Silicon on insulator Thermal conduction Capacitance Electronic Optical and Magnetic Materials Optics Operating temperature Mechanics of Materials Electrical and Electronic Engineering TST-uSPAM: micro Scanning Probe Array Memory TST-SMI: Formerly in EWI-SMI business Actuator |
| Zdroj: | Journal of micromechanics and microengineering, 21(7), 074007-074019. IOP Publishing Ltd. |
| ISSN: | 0960-1317 |
| Popis: | This work presents a MEMS displacement sensor based on the conductive heat transfer of a resistively heated silicon structure towards an actuated stage parallel to the structure. This differential sensor can be easily incorporated into a silicon-on-insulator-based process, and fabricated within the same mask as electrostatic actuators and flexure-based stages. We discuss a lumped capacitance model to optimize the sensor sensitivity as a function of the doping concentration, the operating temperature, the heater length and width. We demonstrate various sensor designs. The typical sensor resolution is 2 nm within a bandwidth of 25 Hz at a full scale range of 110 µm. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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