Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor
| Autor: | Eung-An Lee, Jun-gu Kang, Junho Shin, Joon-Shik Park, Kwang-Bum Park, Sangsoo Noh, Hoo-Jeong Lee |
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| Jazyk: | angličtina |
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Temperature control Materials science business.industry Pt thin film temperature sensor lcsh:T Biomedical Engineering Analytical chemistry Working temperature 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Temperature measurement lcsh:Technology Biomaterials CO and HCHO gases Electrical resistance and conductance 0103 physical sciences Optoelectronics Thin film 0210 nano-technology business Joule heating Micro gas sensor |
| Zdroj: | Micro and Nano Systems Letters, Vol 5, Iss 1, Pp 1-5 (2017) |
| ISSN: | 2213-9621 |
| DOI: | 10.1186/s40486-017-0060-z |
| Popis: | Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1–642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25 ppm CO and 1 ppm HCHO gases were characterized. |
| Databáze: | OpenAIRE |
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