PHOTONICS METROLOGY IN THE NANOSCALE
| Autor: | Reichelt, Stephan, Frenner, Karsten, Schober, Christian, Pruss, Christof |
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| Jazyk: | angličtina |
| Rok vydání: | 2022 |
| Předmět: | |
| DOI: | 10.5281/zenodo.7431783 |
| Popis: | Optical metrology at the nanoscale level is a sophisticated task, where often model-based approaches are utilized. We discuss scatterometry in an advanced implementation as well as some of the capabilities of our Nanopositioning and Nanomeasuring Machine (NPMM-200). |
| Databáze: | OpenAIRE |
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