Measurements of current density distribution in shaped e-beam writers
| Autor: | Jan Bok, Vladimír Kolařík, Michal Urbánek, Vladislav Krzyránek, Miroslav Horáček, Milan Matjěka |
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| Rok vydání: | 2016 |
| Předmět: |
Microscope
Materials science Proximity effect (electron beam lithography) Faraday cup 02 engineering and technology 01 natural sciences law.invention symbols.namesake Optics law 0103 physical sciences Electrical and Electronic Engineering Image resolution 010302 applied physics business.industry Resolution (electron density) 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Resist Cathode ray symbols 0210 nano-technology business Current density |
| Zdroj: | ResearcherID |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2015.09.013 |
| Popis: | In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage of relatively easy implementation. The first and second measurement methods are based on the knife-edge technique in which the e-beam is scanned in two directions across a Faraday cup opening and across shaping shutters of the forming system, respectively. In the third method, a phosphor screen is irradiated by a magnified e-beam spot and the current density distribution is represented by the luminescence image on the screen. The fourth method uses electron sensitive resist which is exposed by the e-beam. The developed resist is observed under a microscope and the current density distribution is judged from the resist profile. All the methods are demonstrated in an example, compared, and their spatial resolution and accuracy evaluated. Display Omitted Four methods for current density mapping in shaped e-beam writers are compared.Spatial resolution and signal-to-noise ratio of each method are evaluated.These methods can be performed using native equipment of typical shaped EB writer. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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