Electrical conductivity of parylene F at high temperature
| Autor: | M. Bechara, Sombel Diaham, Marie-Laure Locatelli, Christophe Tenailleau |
|---|---|
| Přispěvatelé: | Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE) |
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
Materials science
Solid-state physics Annealing (metallurgy) PA-F Matériaux Analytical chemistry Electrical conduction Conductivity Condensed Matter Physics High temperature Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound Crystallinity Parylene chemistry law Electrical resistivity and conductivity Parylene F Materials Chemistry Insulating films Electrical and Electronic Engineering Crystallization |
| Zdroj: | Journal of Electronic Materials. |
| ISSN: | 0361-5235 |
| Popis: | The electrical conductivity of both as-deposited and annealed poly(α,α,α′,α′-tetrafluoro-p-xylylene) (PA-F) films has been investigated up to 400°C. The static conductivity (σ DC) values of PA-F measured between 200°C and 340°C appear to be ∼2.5 orders of magnitude lower for annealed films than for as-deposited ones. This change is attributed to a strong increase in the crystallinity of the material occurring above 340°C. After annealing at 400°C in N2, the σ DC value measured at 300°C, for instance, decreased from 3.8 × 10−12 Ω−1 cm−1 to 7.5 × 10−15 Ω−1 cm−1. Physical interpretations of such an improvement are offered. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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