Laser-induced sputtering of semiconductors due to bound-free transitions of surface atoms

Autor:	E.A. Manykin, A.I. Agafonov
Rok vydání:	2005
Předmět:	X-ray laser Materials science Active laser medium Laser ablation Sputtering Far-infrared laser Ultrafast laser spectroscopy Laser pumping Atomic physics Atomic vapor laser isotope separation
Zdroj:	Conference on Lasers and Electro-Optics Europe.
DOI:	10.1109/cleoe.1994.636564
Popis:	It has been established that photons can, by a quantum process, cause ejection of atomic particles from solid surfaces.1 Laser-induced sputtering (LIS) of semiconductors has been investigated for photons of both above and below the band-gap energies.2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3221b91be5aad786fce7bc3d103698a4 https://doi.org/10.1109/cleoe.1994.636564 Zobrazit plný text záznamu