X-ray and optical characterization of multilayer AlGaAs waveguides
Autor: | Michel Calligaro, Gaetano Assanto, Olivier Durand, Giuseppe Leo, Vincent Berger, C. Caldarella, Gianlorenzo Masini, Xavier Marcadet, A. De Rossi |
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Přispěvatelé: | G., Leo, C., Caldarella, G., Masini, A., DE ROSSI, Assanto, Gaetano, O., Durand, M., Calligaro, X., Marcadet, V., Berger |
Rok vydání: | 2000 |
Předmět: |
Yield (engineering)
Materials science Physics and Astronomy (miscellaneous) business.industry X-ray Physics::Optics Characterization (materials science) Gallium arsenide chemistry.chemical_compound Optics chemistry Optoelectronics Reflectometry business Refractive index Photonic crystal Parametric statistics |
Zdroj: | Applied Physics Letters. 77:3884-3886 |
ISSN: | 1077-3118 0003-6951 |
Popis: | Effective-index measurements in multilayer AlGaAs waveguides are used in conjunction with x-ray reflectometry to yield refractive indices and thicknesses of the constituent layers, with the accuracy required by parametric interactions in guided-wave and photonic-band-gap structures. |
Databáze: | OpenAIRE |
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