Real-time characterization of dielectric charging in contactless capacitive MEMS
| Autor: | Elena Blokhina, Joan Pons-Nin, Sergi Gorreta, Orla Feely, Manuel Dominguez-Pumar, Panagiotis Giounanlis |
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| Přispěvatelé: | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica, Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
| Rok vydání: | 2014 |
| Předmět: |
Microelectromechanical systems
Materials science Dielectric charge control Capacitive sensing Nanoelectronics Gate dielectric Charge (physics) SWITCHES Dielectric Enginyeria de la telecomunicació::Processament del senyal::Adquisició i detecció del senyal [Àrees temàtiques de la UPC] Enginyeria electrònica::Microelectrònica [Àrees temàtiques de la UPC] Dielectric charge characterization Surfaces Coatings and Films Characterization (materials science) Nonlinear system Hardware and Architecture Dielectric charge dynamics Signal Processing Charge control Electronic engineering Nanoelectrònica MEMS reliability |
| Zdroj: | Recercat. Dipósit de la Recerca de Catalunya Universitat Jaume I UPCommons. Portal del coneixement obert de la UPC Universitat Politècnica de Catalunya (UPC) |
| ISSN: | 1573-1979 0925-1030 |
| DOI: | 10.1007/s10470-014-0458-y |
| Popis: | This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of dielectric charging as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted using the proposed characterization method. The characterization method also provides a criterion to avoid nonlinear effects, such as fractal-like behaviour, in charge control. |
| Databáze: | OpenAIRE |
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