Effects of thermal annealing on the morphology of the AlxGa(1−x)N films
| Autor: | Süleyman Özçelik, S. Çörekçi, Ekmel Ozbay, Mehmet Çakmak, Y. Dinç, Orhan Zeybek, Z. Tekeli |
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| Přispěvatelé: | Fen Edebiyat Fakültesi, Özbay, Ekmel |
| Rok vydání: | 2009 |
| Předmět: |
Morphology
RMS roughness Atoms Materials science Annealing (metallurgy) Analytical chemistry chemistry.chemical_element Gallium Surface finish Al-content Annealing treatments Annealing Atomic force microscopy Optics Surface structure General Materials Science Atomic Force Microscope Metallic films Morphology of films Atomic force microscopes business.industry Atomic force microscope Mechanical Engineering Condensed Matter Physics Microstructure Nitrogen chemistry Thermal-annealing Mechanics of Materials Rms roughness Root mean square roughness Surface morphology business Gas ambients Morphology of Films Aluminum |
| Zdroj: | Materials Science in Semiconductor Processing |
| ISSN: | 1369-8001 |
| DOI: | 10.1016/j.mssp.2009.12.004 |
| Popis: | Zeybek, Orhan (Balikesir Author) Effects of thermal annealing on the morphology of the AlxGa(1-x)N films with two different high Al-contents (x=0.43 and 0.52) have been investigated by atomic force microscopy (AFM). The annealing treatments were performed in a nitrogen (N-2) gas ambient as short-time (4 min) and long-time (30 min). Firstly, the films were annealed as short-time in the range of 800-950 degrees C in steps of 50-100 degrees C. The surface root-mean-square (rms) roughness of the films reduced with increasing temperature at short-time annealing (up to 900 degrees C), while their surface morphologies were not changed. At the same time, the degradation appeared on the surface of the film with lower Al-content after 950 degrees C. Secondly, the Al0.43Ga0.57N film was annealed as long-time in the range of 1000-1200 degrees C in steps of 50 degrees C. The surface morphology and rms roughness of the film with increasing temperature up to 1150 degrees C did not significantly change. Above those temperatures, the surface morphology changed from step-flow to grain-like and the rms roughness significantly increased. Turkish State Planning Organization - 2001K120590 Turkish Academy of Sciences |
| Databáze: | OpenAIRE |
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