Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides
| Autor: | Duk-Yong Choi, Silvio Gees, Arnan Mitchell, Andreas Frigg, David J. Moss, Thach G. Nguyen, Guanghui Ren, Andreas Boes |
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| Rok vydání: | 2020 |
| Předmět: |
lcsh:Applied optics. Photonics
Materials science Computer Networks and Communications business.industry Lithium niobate Photonic integrated circuit lcsh:TA1501-1820 Nonlinear optics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 7. Clean energy Atomic and Molecular Physics and Optics 010309 optics chemistry.chemical_compound Resonator Frequency comb Silicon nitride chemistry 0103 physical sciences Optoelectronics Photonics 0210 nano-technology business Free spectral range |
| Zdroj: | APL Photonics, Vol 5, Iss 1, Pp 011302-011302-6 (2020) |
| ISSN: | 2378-0967 |
| DOI: | 10.1063/1.5136270 |
| Popis: | Integrated silicon nitride (SiN) waveguides with anomalous dispersion have the potential to bring practical nonlinear optics to mainstream photonic integrated circuits. However, high-stress and high-processing temperatures remain an obstacle to mass adoption. We report low-stress, high-confinement, dispersion-engineered SiN waveguides utilizing low temperature grown reactive sputtered thin-films. We demonstrate a microring resonator with an intrinsic quality factor of 6.6 × 105, which enabled us to generate a native free spectral range spaced frequency comb with an estimated on-chip pump power of 850 mW. Importantly, the peak processing temperature is 400 °C making this approach fully back-end compatible for hybrid integration with preprocessed CMOS substrates and temperature sensitive photonic platforms such as lithium niobate on insulator. |
| Databáze: | OpenAIRE |
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