Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas

Autor:	Quan-Zhi Zhang, Yong-Xin Liu, Xiang-Zhan Jiang, You-Nian Wang, Lu-Jing Hou, Wen-Qi Lu, Wei Jiang
Rok vydání:	2011
Předmět:	Physics High energy Physics::Plasma Physics Double probe Physics::Space Physics General Physics and Astronomy Resonance Dual frequency Light emission Plasma Electron Atomic physics Plasma density
Zdroj:	Physical Review Letters. 107
ISSN:	1079-7114 0031-9007
DOI:	10.1103/physrevlett.107.055002
Popis:	We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3125a997602e51e419802895061121ca https://doi.org/10.1103/physrevlett.107.055002 Zobrazit plný text záznamu