Piezoelectric MEMS Linear Motor for Nanopositioning Applications
| Autor: | Abdallah Ababneh, José Luis Sánchez-Rojas, Helmut Seidel, Víctor Ruiz-Díez, J. Hernando-García, J. Toledo |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Control and Optimization
Fabrication Materials science Acoustics bidirectional linear motion 02 engineering and technology 01 natural sciences Displacement (vector) Standing wave Resonator lcsh:TK1001-1841 0103 physical sciences lcsh:TA401-492 traveling wave AlN nanopositioning 010302 applied physics Microelectromechanical systems conveyor Linear motor 021001 nanoscience & nanotechnology Piezoelectricity lcsh:Production of electric energy or power. Powerplants. Central stations MEMS Control and Systems Engineering standing wave Electrode lcsh:Materials of engineering and construction. Mechanics of materials piezoelectric 0210 nano-technology |
| Zdroj: | Actuators, Vol 10, Iss 36, p 36 (2021) Actuators Volume 10 Issue 2 |
| DOI: | 10.22028/d291-33445 |
| Popis: | This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders. |
| Databáze: | OpenAIRE |
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