Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies
| Autor: | Laurence D. Marks, Hawoong Hong, Tassie K. Andersen, Dillon D. Fong, Erika Benda, Seyoung Cook |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Scattering business.industry Oxide X-ray Advanced Photon Source 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences chemistry.chemical_compound Beamline chemistry 0103 physical sciences X-ray crystallography Deposition (phase transition) Optoelectronics 0210 nano-technology business Instrumentation Molecular beam epitaxy |
| Zdroj: | The Review of scientific instruments. 89(3) |
| ISSN: | 1089-7623 |
| Popis: | A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. The high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell. |
| Databáze: | OpenAIRE |
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