Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

Autor: Etienne Patoor, Raphaël Pesci, Denis Bouscaud, Sophie Berveiller
Přispěvatelé: Laboratoire d'Etude des Microstructures et de Mécanique des Matériaux (LEM3), Université de Lorraine (UL)-Centre National de la Recherche Scientifique (CNRS)-Arts et Métiers Sciences et Technologies, HESAM Université (HESAM)-HESAM Université (HESAM)
Rok vydání: 2012
Předmět:
Diffraction
Matériaux [Sciences de l'ingénieur]
Materials science
Scanning electron microscope
02 engineering and technology
01 natural sciences
[SPI.MAT]Engineering Sciences [physics]/Materials
law.invention
Condensed Matter::Materials Science
Optics
Lattice parameter
law
0103 physical sciences
Microscopy
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Electron beam-induced deposition
Instrumentation
Environmental scanning electron microscope
X-rays spatial resolution
010302 applied physics
Conventional transmission electron microscope
Micro et nanotechnologies/Microélectronique [Sciences de l'ingénieur]
business.industry
021001 nanoscience & nanotechnology
Atomic and Molecular Physics
and Optics
Electronic
Optical and Magnetic Materials
Kossel microdiffraction
Cathode ray
Physics::Accelerator Physics
Electron microscope
0210 nano-technology
business
Specimen heating
Zdroj: Ultramicroscopy
Ultramicroscopy, Elsevier, 2012, 115, pp.115-119. ⟨10.1016/j.ultramic.2012.01.018⟩
ISSN: 0304-3991
DOI: 10.1016/j.ultramic.2012.01.018
Popis: Lien vers la version éditeur: http://www.sciencedirect.com/science/article/pii/S0304399112000307; International audience; A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced.
Databáze: OpenAIRE
Externí odkaz: