Low Resistivity and High Breakdown Current Density of 10 nm Diameter van der Waals TaSe3 Nanowires by Chemical Vapor Deposition
| Autor: | Miguel Isarraraz, Ludwig Bartels, Aimee Martinez, Alexander A. Balandin, Michelle Wurch, Yanbing Zhu, Sergey L. Rumyantsev, Evan J. Reed, Adane K. Geremew, Thomas A. Empante, Koichi Yamaguchi |
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| Rok vydání: | 2019 |
| Předmět: |
Condensed Matter - Materials Science
Materials science Condensed matter physics Mechanical Engineering Nanowire Materials Science (cond-mat.mtrl-sci) FOS: Physical sciences Bioengineering 02 engineering and technology General Chemistry Chemical vapor deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Metal symbols.namesake Electrical resistivity and conductivity visual_art visual_art.visual_art_medium symbols General Materials Science van der Waals force 0210 nano-technology Current density |
| Zdroj: | Nano Letters. 19:4355-4361 |
| ISSN: | 1530-6992 1530-6984 |
| DOI: | 10.1021/acs.nanolett.9b00958 |
| Popis: | Micron-scale single-crystal nanowires of metallic TaSe3, a material that forms -Ta-Se3-Ta-Se3- stacks separated from one another by a tubular van der Waals (vdW) gap, have been synthesized using chemical vapor deposition (CVD) on a SiO2/Si substrate, in a process compatible with semiconductor industry requirements. Their electrical resistivity was found unaffected by downscaling from the bulk to as little as 7 nm in width and height, in striking contrast to the resistivity of copper for the same dimensions. While the bulk resistivity of TaSe3 is substantially higher than that of bulk copper, at the nanometer scale the TaSe3 wires become competitive to similar-sized copper ones. Moreover, we find that the vdW TaSe3 nanowires sustain current densities in excess of 108 A/cm2 and feature an electromigration energy barrier twice that of copper. The results highlight the promise of quasi-one-dimensional transition metal trichalcogenides for electronic interconnect applications and the potential of van der Waals materials for downscaled electronics. |
| Databáze: | OpenAIRE |
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