Heterodyne speckle interferometry for measurement of two-dimensional displacement
| Autor: | Po-Chun Kuo, Hung-Lin Hsieh |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Heterodyne
Physics business.industry Phase (waves) Physics::Optics 02 engineering and technology 021001 nanoscience & nanotechnology Interference (wave propagation) 01 natural sciences Atomic and Molecular Physics and Optics Displacement (vector) 010309 optics Speckle pattern Interferometry Optics 0103 physical sciences Speckle imaging 0210 nano-technology business Diffraction grating |
| Zdroj: | Optics express. 28(1) |
| ISSN: | 1094-4087 |
| Popis: | This paper presented a heterodyne speckle interferometer (HSI) for the measurement of two-dimensional in-plane displacement. A diffraction grating is used to split the light source into four beams, which are then reflected into a non-mirror measurement surface at symmetrical incident angles, before being scattered to form an interference pattern. In accordance with the Doppler Effect, in-plane displacement of the surface causes phase variations in speckle interference patterns, from which displacement information can be obtained. Several experiments were performed to evaluate the feasibility of the proposed HSI. Experiment results demonstrate that the proposed system is capable of accurately measuring in-plane displacement with a resolution of approximately 1.5 nm. |
| Databáze: | OpenAIRE |
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