Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives
| Autor: | W.H. Hsieh, Denny K. Miu, Shuyun Wu, Yu-Chong Tai, Viktoria Temesvary |
|---|---|
| Rok vydání: | 1995 |
| Předmět: |
Engineering
Fabrication business.industry Mechanical Engineering Mechanical engineering computer.software_genre Manufacturing cost Surface micromachining Servo bandwidth Electronic engineering Computer Aided Design Systems design Instrumentation (computer programming) Electrical and Electronic Engineering business computer Caltech Library Services Dynamic testing |
| Zdroj: | Journal of Microelectromechanical Systems. 4:18-27 |
| ISSN: | 1057-7157 |
| DOI: | 10.1109/84.365366 |
| Popis: | This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other engineering applications of microstructures and microactuators requiring significant out-of-plane motions. The objective of the optimization effort is to increase the in-plane to out-of-plane stiffness ratio in order to maximize compliance and servo bandwidth and to increase the displacement to strain ratio to maximize the shock resistance of the microgimbals, while that of the process modification effort is to simplify in order to reduce manufacturing cost. The testing effort is to characterize both the static and dynamic performance using precision instrumentation in order to compare various prototype designs. > |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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