A Single-Walled Carbon Nanotube Network Gas Sensing Device
Autor: | Han-Wen Kuo, Kea-Tiong Tang, Tseng-Hsiung Su, Gia-Nan Shi, Chang-Ping Chang, Shang-Ren Yang, Cheng-Long Ho, Li-Chun Wang, I-Ju Teng, Cheng Tzu Kuo |
---|---|
Jazyk: | angličtina |
Rok vydání: | 2011 |
Předmět: |
inorganic chemicals
Silicon dioxide single-walled carbon nanotube (SWCNT) networks Nitrogen Dioxide Nanotechnology Carbon nanotube lcsh:Chemical technology Spectrum Analysis Raman Biochemistry Electric charge Article Analytical Chemistry Catalysis law.invention Absorption chemistry.chemical_compound Microscopy Electron Transmission law Ammonia Aluminum Oxide chemical vapors lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation Electrodes business.industry Nanotubes Carbon Physics Equipment Design Silicon Dioxide Atomic and Molecular Physics and Optics gas sensing device Semiconductor chemistry Chemical engineering Semiconductors Metals Electrode Microscopy Electron Scanning Gases Absorption (chemistry) business Layer (electronics) |
Zdroj: | Sensors (Basel, Switzerland) Sensors, Vol 11, Iss 8, Pp 7763-7772 (2011) Sensors; Volume 11; Issue 8; Pages: 7763-7772 |
ISSN: | 1424-8220 |
Popis: | The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al(2)O(3)-deposted SiO(2)/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO(2) and NH(3) vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO(2) and 24 ppm for NH(3). |
Databáze: | OpenAIRE |
Externí odkaz: |