A Single-Walled Carbon Nanotube Network Gas Sensing Device

Autor: Han-Wen Kuo, Kea-Tiong Tang, Tseng-Hsiung Su, Gia-Nan Shi, Chang-Ping Chang, Shang-Ren Yang, Cheng-Long Ho, Li-Chun Wang, I-Ju Teng, Cheng Tzu Kuo
Jazyk: angličtina
Rok vydání: 2011
Předmět:
Zdroj: Sensors (Basel, Switzerland)
Sensors, Vol 11, Iss 8, Pp 7763-7772 (2011)
Sensors; Volume 11; Issue 8; Pages: 7763-7772
ISSN: 1424-8220
Popis: The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al(2)O(3)-deposted SiO(2)/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO(2) and NH(3) vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO(2) and 24 ppm for NH(3).
Databáze: OpenAIRE