Surface profiles of reflow microlenses under the influence of surface tension and gravity

Autor:	Christian Ossmann, Andreas Schilling, Roman Merz, Hans Peter Herzig
Předmět:	Surface (mathematics) Microlens Gravity (chemistry) Materials science Fabrication business.industry Optical engineering General Engineering Atomic and Molecular Physics and Optics Finite element method Surface tension Optics Photomask business
Popis:	We present a finite-element method to calculate 3-D surface profiles of refractive microlenses fabricated by melting-resist technology (reflow technique). The geometry of the microlenses can be arbitrary. Surface tension and gravity are taken into account. Gravity can have an advantageous influence on the profile form, so that smaller focal spots can be achieved. A simple scaling law is given to estimate the influence of gravity on the profile form for given microlens parameters. We compared various theoretical and measured surface profiles of microlenses fabricated by melting-resist technology and found good agreement. Finally, the usefulness of this method for the design of refractive microstructures for smart masks is shown.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2b78fc83f68e95a78381d95fb738bff5 https://infoscience.epfl.ch/record/136354 Zobrazit plný text záznamu