Nonlinear mechanical effects in silicon longitudinal mode beam resonators
| Autor: | Antti Lipsanen, Aarne Oja, Tomi Mattila, V. Kaajakari |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2005 |
| Předmět: |
Materials science
Silicon chemistry.chemical_element Modulus Longitudinal mode Resonator Quality (physics) Optics micromechanical oscillators microelectromechanical resonators bulk acoustic wave devices Electrical and Electronic Engineering Instrumentation business.industry Metals and Alloys resonators Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials microresonators Nonlinear system Hysteresis chemistry hysteresis business nonlinearities nonlinear oscillators Beam (structure) |
| Zdroj: | Kaajakari, V, Mattila, T, Lipsanen, A & Oja, A 2005, ' Nonlinear mechanical effects in silicon longitudinal mode beam resonators ', Sensors and Actuators A: Physical, vol. 120, no. 1, pp. 64-70 . https://doi.org/10.1016/j.sna.2004.11.010 |
| ISSN: | 1873-3069 0924-4247 |
| DOI: | 10.1016/j.sna.2004.11.010 |
| Popis: | The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor ( Q > 100 000 ). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1 1 0] direction than for beams in [1 0 0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators. |
| Databáze: | OpenAIRE |
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