Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds
| Autor: | Brian G. Bush, William A. Osborn, Mark J. McLean |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Background subtraction
Materials science Strain (chemistry) business.industry 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Rotation 01 natural sciences Signal 0104 chemical sciences Amorphous solid Optics Electron beam-induced deposition 0210 nano-technology business Instrumentation Single crystal Electron backscatter diffraction |
| Zdroj: | Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada. 25(1) |
| ISSN: | 1435-8115 |
| Popis: | Applying high-resolution electron backscatter diffraction (HR-EBSD) to materials without regions that are amenable to the acquisition of backgrounds for static flat fielding (background subtraction) can cause analysis problems. To address this difficulty, the efficacy of electron beam induced deposition (EBID) of material as a source for an amorphous background signal is assessed and found to be practical. Using EBID material for EBSD backgrounds allows single crystal and large-grained samples to be analyzed using HR-EBSD for strain and small angle rotation measurement. |
| Databáze: | OpenAIRE |
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