Effect of Thin Aluminum Coatings on Structural Damping of Silicon Microresonators

Autor:	Srikar Vengallatore, Luc G. Fréchette, Guruprasad Sosale, Sairam Prabhakar
Rok vydání:	2009
Předmět:	Materials science Cantilever Silicon Composite number chemistry.chemical_element engineering.material Dissipation Resonator Thermoelastic damping Coating chemistry engineering Thin film Composite material
Zdroj:	Scopus-Elsevier
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-1222-dd01-06
Popis:	Quantifying the effects of thin metallic coatings on the damping factors of micro- and nanomechanical resonators is important for the design of high-performance devices for sensing and communications. This study presents experimental results for the increase in damping caused by aluminum films coated on cantilevered single-crystal silicon beams. The monolithic silicon beams (100 to 125 microns thick) can operate at the ultimate limits of dissipation established by thermoelastic damping with quality factors ranging from 104 to 105. However, coating these beams with 60 to 100 nm of aluminum can increase the damping by factors of three to five. These results provide guidelines for designing composite micromechanical resonators, and establish the foundation of a new approach for accurate measurement of internal friction in substrate-bonded thin films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::287c04a6e687ef8380bc972c83a5e0bd https://doi.org/10.1557/proc-1222-dd01-06 Zobrazit plný text záznamu Full text from SpringerLink