Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films
| Autor: | Akram Alhussein, Mohammed Abdul Samad, Aleksei Obrosov, Linda Aissani, Mamoun Fellah, Ahlam Belgroune |
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| Přispěvatelé: | Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée (LASMIS), Université de Technologie de Troyes (UTT) |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Zirconium
Materials science General Physics and Astronomy chemistry.chemical_element Surfaces and Interfaces General Chemistry [CHIM.MATE]Chemical Sciences/Material chemistry Sputter deposition Nanoindentation Condensed Matter Physics Microstructure Surfaces Coatings and Films Volumetric flow rate Contact angle chemistry Sputtering Composite material Thin film ComputingMilieux_MISCELLANEOUS |
| Zdroj: | Surfaces and Interfaces Surfaces and Interfaces, 2021, 26, pp.101441. ⟨10.1016/j.surfin.2021.101441⟩ |
| ISSN: | 2468-0230 |
| DOI: | 10.1016/j.surfin.2021.101441⟩ |
| Popis: | Structural and tribo-mechanical properties of Zr-O-N films deposited by reactive magnetron sputtering in a mixture of Ar (flow rate = 80 sccm), N2 (flow rate = 20 sccm) and O2 with a varying flow rate of 0 to 12 sccm were investigated. The films were characterized using scanning electron microscopy, energy dispersive x-ray analysis, atomic force microscopy, nanoindentation and wear tests. Oxygen content have a significant effect on the microstructure, wettability, tribo-mechanical properties of Zr-O-N films. The Zr-O-N films showed a dense structure with a mixture of zirconium oxides and nitrides and the preferred orientation changed from (111) ZrN to (200) ZrN with increasing O2 flow rate. The ZrON film, deposited at an oxygen flow rate of 10 sccm exhibited the highest contact angle (147°), the highest hardness (27.1 GPa), the lowest friction coefficient (0.36) and the lowest wear rate (5.8 × 10−7 mm3·Nm−1). The improvement in the tribological performance of the ZrON film deposited at 10 sccm is attributed to the improved hardness and increased H/E and H3/E2 ratios, due to the formation of a hard solid solution by the diffusion of oxygen. |
| Databáze: | OpenAIRE |
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