Effects of Annealing on Residual Stress in Titania Germania Mixtures Deposited by Ion Beam Sputtering
| Autor: | Randel, E., Davenport, A., Osovsky, R., Lalande, É, Chicoine, M., François Schiettekatte, Markosyan, A., Bassiri, R., Fejer, M. M., Menoni, C. S. |
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| Rok vydání: | 2022 |
| Zdroj: | Scopus-Elsevier |
| DOI: | 10.1364/oic.2022.wb.5 |
| Popis: | We report on the effects of annealing on the residual film stress in titania germania mixtures grown by ion beam sputter deposition. Understanding stress during processing is critical in designing robust multilayer coatings. |
| Databáze: | OpenAIRE |
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