Numerical modelling of electrostatic force microscopes considering charge and dielectric constant
| Autor: | Thomas Preisner, Uzzal Binit Bala, Wolfgang Mathis, M. Greiff |
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| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
Engineering
Dielectric waveguides Dewey Decimal Classification::600 | Technik::620 | Ingenieurwissenschaften und Maschinenbau Mechanical engineering Boundary elements Electrostatic devices Numerical simulations Nanotechnology Ceramic capacitors ddc:510 Eulerian Lagrangian Mathematical models Mathematical model Applied Mathematics High resolutions Finite element analysis Spherical coordinate system Mechanics Computer simulation Electrostatics Simulation models Dewey Decimal Classification::500 | Naturwissenschaften::510 | Mathematik Finite element method Computer Science Applications Computational Theory and Mathematics Numerical modelling Finite-element methods Microstructured devices Measuring instruments ddc:620 Electrostatic force microscopes Simulation Dissociation Numerical analysis Electric fields Electric field distributions Measuring tools Number theory Spherical co-ordinates Boundary element method Remeshing algorithms Electrical and Electronic Engineering Model structures Coupling FOS: Nanotechnology business.industry Efficient couplings Electrostatic force Three dimensional Numerical approaches Calculation time Micro-electro mechanical systems Permittivity Dielectric constants Microelectromechanical devices Numerical methods business Instruments |
| Zdroj: | COMPEL-The International Journal for Computation and Mathematics in Electrical and Electronic Engineering 28 (2009), Nr. 1 |
| Popis: | PurposeThe purpose of this paper is to present a hybrid numerical simulation approach for the calculation of potential and electric field distribution considering charge and dielectric constant.Design/methodology/approachEach numerical method has its own advantages and disadvantages. The idea is to overcome the disadvantages of the corresponding numerical method by coupling with other numerical methods. An augmented finite element method (FEM), linear FEM and boundary element method are used with an efficient coupling.FindingsThe simulation model of microstructured devices is not so simple. During the simulation various types of problems will occur. It is found that by using several numerical methods these problems can be overcome and the calculation can be performed efficiently.Research limitations/implicationsThe present approach can be applied in 2D cases. But, in 3D cases the calculation of augmented FEM in a spherical coordinate becomes quite elaborate.Practical implicationsThe proposed hybrid numerical simulation approach can be applied for the simulation of the electrostatic force microscope (EFM) which is a very high‐resolution measuring tool in nanotechnology. This approach can be applied also to other micro‐electro‐mechanical systems.Originality/valueSince the scanning process of the EFM is dynamic, it requires the updating of the FEM mesh in each calculation time step. In the present paper, the mesh updating is achieved by an arbitrary Lagrangian‐Eulerian (ALE) method. The proposed numerical approach can be applied for the simulation of the EFM including this remeshing algorithm ALE. |
| Databáze: | OpenAIRE |
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