Influence of a superficial field of residual stress on the propagation of surface waves - Applied to the estimation of the depth of the superficial stressed zone

Autor: Frédéric Jenot, Jean-Etienne Lefebvre, Marc Duquennoy, Julien Deboucq, Mohamed Ourak, Mohammadi Ouaftouh
Přispěvatelé: Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Jazyk: angličtina
Rok vydání: 2012
Předmět:
Zdroj: Applied Physics Letters
Applied Physics Letters, American Institute of Physics, 2012, 101, pp.234104-1-3. ⟨10.1063/1.4768434⟩
Applied Physics Letters, 2012, 101, pp.234104-1-3. ⟨10.1063/1.4768434⟩
ISSN: 0003-6951
DOI: 10.1063/1.4768434⟩
Popis: In this study, we were interested in the dispersion of surface waves caused by the presence of a micrometric field of residual stress on the surface of an amorphous medium. We have shown that in relation to surface waves, a stressed structure like this is comparable to a layer on substrate type structure. The design and implementation of SAW-IDT MEMS sensors enabled quasi-monochromatic Rayleigh-type surface waves to be generated and the dispersion phenomenon to be studied over a wide range of frequencies for different superficial fields of residual stress. The thicknesses of the stressed cortical zones were estimated with good accuracy using an inverse method.
Databáze: OpenAIRE