Influence of a superficial field of residual stress on the propagation of surface waves - Applied to the estimation of the depth of the superficial stressed zone
Autor: | Frédéric Jenot, Jean-Etienne Lefebvre, Marc Duquennoy, Julien Deboucq, Mohamed Ourak, Mohammadi Ouaftouh |
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Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
Jazyk: | angličtina |
Rok vydání: | 2012 |
Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Wave propagation business.industry 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences symbols.namesake [SPI]Engineering Sciences [physics] Optics Residual stress Surface wave Free surface 0103 physical sciences symbols Composite material Rayleigh wave 0210 nano-technology Dispersion (water waves) business Mechanical wave 010301 acoustics Longitudinal wave |
Zdroj: | Applied Physics Letters Applied Physics Letters, American Institute of Physics, 2012, 101, pp.234104-1-3. ⟨10.1063/1.4768434⟩ Applied Physics Letters, 2012, 101, pp.234104-1-3. ⟨10.1063/1.4768434⟩ |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.4768434⟩ |
Popis: | In this study, we were interested in the dispersion of surface waves caused by the presence of a micrometric field of residual stress on the surface of an amorphous medium. We have shown that in relation to surface waves, a stressed structure like this is comparable to a layer on substrate type structure. The design and implementation of SAW-IDT MEMS sensors enabled quasi-monochromatic Rayleigh-type surface waves to be generated and the dispersion phenomenon to be studied over a wide range of frequencies for different superficial fields of residual stress. The thicknesses of the stressed cortical zones were estimated with good accuracy using an inverse method. |
Databáze: | OpenAIRE |
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