High-Coupling and High-Velocity SAW Using ZnO and AlN Films on a Glass Substrate

Autor:	A. Kawabata, F. Takeda, T. Shiosaki, Y. Mikamura
Rok vydání:	1986
Předmět:	Materials science Acoustics and Ultrasonics business.industry High velocity Substrate (electronics) Optics Sputtering visual_art visual_art.visual_art_medium Coupling (piping) Ceramic Electrical and Electronic Engineering Composite material business Instrumentation
Zdroj:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 33(3)
ISSN:	0885-3010
Popis:	Une couche de nitrure d'aluminium pulverisee sur un substrat en verre peut etre un substitut peu couteux aux substrats en saphir et ceramique
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2596901d219489ab950d65c9ebbeb3ac https://pubmed.ncbi.nlm.nih.gov/18291791 Zobrazit plný text záznamu