Flexible photonic devices based on dielectric antennas
Autor: | Abdennacer Benali 1, Jean-Benoît Claude 2, Nicoletta Granchi 1, 3, 4, Simona Checcucci 1, Mohammed Bouabdellaoui 1, 5, Mimoun Zazoui 5, Monica Bollani 6, Marco Salvalaglio 7, Jérôme Wenger 2, Luc Favre 1, David Grosso 1, Antoine Ronda 1, Isabelle Berbezier 1, Massimo Gurioli 1, Marco Abbarchi 1 |
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Jazyk: | angličtina |
Předmět: |
Materials science
SiGe Silicon on insulator 02 engineering and technology Dielectric 010402 general chemistry 01 natural sciences Light scattering photonic devices dielectric nanoantenna Resonator chemistry.chemical_compound Wafer Electrical and Electronic Engineering flexible photonic business.industry 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics 0104 chemical sciences Electronic Optical and Magnetic Materials Silicon-germanium chemistry Optoelectronics Photonics 0210 nano-technology business Refractive index |
Zdroj: | Journal of physics (Online) (2020). doi:10.1088/2515-7647/ab6713 info:cnr-pdr/source/autori:Abdennacer Benali 1, Jean-Benoît Claude 2, Nicoletta Granchi 1,3,4, Simona Checcucci 1,3,4, Mohammed Bouabdellaoui 1,5, Mimoun Zazoui 5, Monica Bollani 6, Marco Salvalaglio 7, Jérôme Wenger 2, Luc Favre 1, David Grosso 1, Antoine Ronda 1, Isabelle Berbezier 1, Massimo Gurioli 1,3 and Marco Abbarchi 1/titolo:Flexible photonic devices based on dielectric antennas/doi:10.1088%2F2515-7647%2Fab6713/rivista:Journal of physics (Online)/anno:2020/pagina_da:/pagina_a:/intervallo_pagine:/volume Journal of Physics: Photonics |
ISSN: | 2515-7647 0957-4484 0022-3727 |
DOI: | 10.1088/2515-7647/ab6713 |
Popis: | Flexible and stretchable photonics are emerging fields aiming to develop novel applications where the devices need to conform to uneven surfaces or whenever lightness and reduced thickness are major requirements. However, owing to the relatively small refractive index of transparent soft matter including most polymers, these materials are not well adapted for light management at visible and near-infrared frequencies. Here we demonstrate simple, low cost and efficient protocols for fabricating Si1−x Ge x -based, sub-micrometric dielectric antennas over record scales (50 mm wafers) with ensuing hybrid integration into different plastic supports. The transfer process has a near-unity yield: up to 99.94% for disordered structures and 99.5% for the ordered counterpart. Finally, we benchmark the optical quality of the dielectric antennas with light scattering measurements, demonstrating the control of the islands structural color and the onset of sharp Mie modes after encapsulation in plastic. Thanks to the ease of implementation of our fabrication methods, these results are relevant for the integration of SiGe-based dielectric Mie resonators in flexible substrates over large surfaces. |
Databáze: | OpenAIRE |
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