Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure
| Autor: | Sergei A. Kokarev, Andrei A. Kharissov, Vadim V. Cherkashin, Valerii P. Kiryanov, Alexander G. Verhoglyad, Aleksei V. Kiryanov, Evgeny G. Churin, Alexander G. Poleshchuk, Voldemar Petrovich Koronkevich, Victor P. Korolkov |
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| Rok vydání: | 2008 |
| Předmět: |
Diffraction
Physics business.industry Materials Science (miscellaneous) Zone plate Laser Diffraction efficiency Industrial and Manufacturing Engineering law.invention Optics Position (vector) law Digital pattern generator Cartesian coordinate system Business and International Management Polar coordinate system business |
| Zdroj: | Applied optics. 38(8) |
| ISSN: | 1559-128X |
| Popis: | A precision laser pattern generator for writing arbitrary diffractive elements was developed as an alternative to Cartesian coordinate laser/electron-beam writers. This system allows for the fabrication of concentric continuous-relief and arbitrary binary patterns with minimum feature sizes of less than 0.6 microm and position accuracy of 0.1 microm over 300-mm substrates. Two resistless technologies of writing on chromium and on amorphous silicon films were developed and implemented. We investigated limit characteristics by writing special test structures. A 58-mm f/1.1 zone plate written directly is demonstrated at a lambda/50 rms wave-front error corresponding to a 0.06-microm pattern accuracy. Several examples of fabricated diffractive elements are presented. |
| Databáze: | OpenAIRE |
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