Analytical model of micromachining of brittle materials with sharp particles
Autor: | Michael Kraft, H. Wensink, Zakaria Moktadir |
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Rok vydání: | 2005 |
Předmět: |
Materials science
Applied physics Manufacturing process Astrophysics::High Energy Astrophysical Phenomena General Engineering Materialtechnik Micro machining Brittle materials Quantitative Biology::Genomics Analytical model Surface micromachining Condensed Matter::Materials Science Brittleness IR-76926 hemic and lymphatic diseases Forensic engineering Composite material Rock blasting |
Zdroj: | Microelectronics journal, 36(3-6), 608-611. Elsevier |
ISSN: | 0026-2692 |
DOI: | 10.1016/j.mejo.2005.02.082 |
Popis: | We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a powder blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory. |
Databáze: | OpenAIRE |
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