High Resolution Fabrication of Interconnection Lines Using Picosecond Laser and Controlled Deposition of Gold Nanoparticles
| Autor: | Asaf Shahmoon, Michael Schmidt, Zeev Zalevsky, Johnnes Strauß, Hadar Zafri |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Interconnection
Fabrication Materials science Nanostructure business.industry Scanning electron microscope Nanoparticle Nanotechnology 02 engineering and technology Physics and Astronomy(all) 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam picosecond laser 0104 chemical sciences Nanolithography Microelectronics nanofabrication Interconnection lines nanoparticles 0210 nano-technology business |
| Zdroj: | Physics Procedia. 83:188-193 |
| ISSN: | 1875-3892 |
| DOI: | 10.1016/j.phpro.2016.08.153 |
| Popis: | In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic. |
| Databáze: | OpenAIRE |
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