Improvement of the Thermal Resistance of Thin Film Heaters on Glass Substrate for Lab-on-Chip Applications
| Autor: | Domenico Caputo, Pisana Placidi, Andrea Scorzoni, Augusto Nascetti, Stefano Zampolli, Michele Tavernelli, G. Petrucci, Paolo Valigi |
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| Rok vydání: | 2014 |
| Předmět: |
Microheater
Materials science microheater Thermal resistance Substrate (electronics) Heat sink law.invention Thin film heater on glass law Thermal Electronic engineering Thermal mass Thin film Engineering(all) Lab-On-Chip business.industry thermal resistance General Medicine Lab-on-a-chip glass microfabrication micromashining thermal capacitance thermal time constant Lab-On-Chip Thin film heater on glass glass microfabrication microheater thermal resistance thermal capacitance thermal time constant Optoelectronics business |
| Zdroj: | Procedia Engineering. 87:959-962 |
| ISSN: | 1877-7058 |
| Popis: | This paper describes a novel and easily manufacturable method for increasing the thermal resistance of microheaters fabricated on glass substrates, thus decreasing the thermal dissipation of the devices. An automatic sawing machine was exploited to dig 240 μm wide trenches in order to thermally isolate the heater from the glass substrate and four different layouts of the trenches have been investigated. An improvement of the thermal resistance up to 217% on a heat sink and 30% in air has been obtained. The thermal capacitance was also considerably decreased, thus improving the dynamic thermal behavior. |
| Databáze: | OpenAIRE |
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