Manufacture of a 10-km-scale radius-of-curvature surface by use of a thin-film coating technique

Autor:	Takayuki Tomaru, Shinji Miyoki, Masatake Ohashi, H Karoji, Koichi Waseda
Rok vydání:	2005
Předmět:	Materials science Waviness business.industry Polishing Surface finish engineering.material Curvature Atomic and Molecular Physics and Optics Radius of curvature (optics) Optics Coating engineering Surface roughness business Surface states
Zdroj:	Optics letters. 30(11)
ISSN:	0146-9592
Popis:	We tried a method of making a 10-km-class large-radius-of-curvature surface that would satisfy both low microroughness (0.1 nm rms) and low waviness (lambda/100) by forming a spherically curved film with a low-loss coating technique on a flat surface produced by mechanical (chemical) polishing. We obtained a SiO2 surface with a 10255 +/- 250-m radius of spherical curvature that had less than lambda/30 waviness and 0.4-nm micro-roughness over a 9-cm-diameter area.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2378e736e232af6b81030edb4517f401 https://pubmed.ncbi.nlm.nih.gov/15981546 Zobrazit plný text záznamu