Moisture resistance of SU-8 and KMPR as structural material

Autor: Joost Melai, Jurriaan Schmitz, Cora Salm, V.M. Blanco Carballo
Jazyk: angličtina
Rok vydání: 2009
Předmět:
Zdroj: Microelectronic engineering, 86(4-6), 765-768. Elsevier
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.12.076
Popis: This paper treats the moisture resistance of SU-8 and KMPR, two photoresists considered as structural material in microsystems. Our experiments focus on the moisture resistance of newly developed radiation imaging detectors containing these resists. Since these microsystems will be used unpackaged, they are susceptible to all kinds of environmental conditions. Already after 1 day of exposure to a humid condition the structural integrity and adhesion of SU-8 structures, measured by a shear test is drastically reduced. KMPR photoresist shows much stronger moisture resistance properties, making it a suitable alternative in our application.
Databáze: OpenAIRE
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