Characterization of the Piezoresistive Effects of Silicon Nanowires
| Autor: | Taeyup Kim, Seohyeong Jang, Kyo-in Koo, Jinwoo Sung, Dong-il Dan Cho, Bobaro Chang, Hyoungho Ko |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Silicon chemistry.chemical_element 02 engineering and technology piezoresistive effects lcsh:Chemical technology 01 natural sciences Biochemistry Article Analytical Chemistry 0103 physical sciences lcsh:TP1-1185 Surface charge silicon nanowire Electrical and Electronic Engineering 010306 general physics Silicon nanowires Instrumentation Stress concentration business.industry Charge density nonlinearity 021001 nanoscience & nanotechnology Piezoresistive effect Atomic and Molecular Physics and Optics Characterization (materials science) surface depletion effects chemistry Optoelectronics 0210 nano-technology business Order of magnitude |
| Zdroj: | Sensors (Basel, Switzerland) Sensors Volume 18 Issue 10 Sensors, Vol 18, Iss 10, p 3304 (2018) |
| ISSN: | 1424-8220 |
| Popis: | Silicon nanowires (SiNWs) have received attention in recent years due to their anomalous piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively researched, they are still not fully understood. Herein, we develop a new model of the PZR effects of SiNWs to characterize the PZR effects. First, the resistance of SiNW is modeled based on the surface charge density. The characteristics of SiNW, such as surface charge and effective conducting area, can be estimated by using this resistance model. Then, PZR effects are modeled based on stress concentration and piezopinch effects. Stress concentration as a function of the physical geometry of SiNWs can amplify PZR effects by an order of magnitude. The piezopinch effects can also result in increased PZR effects that are at least two times greater than that of bulk silicon. Experimental results show that the proposed model can predict the PZR effects of SiNWs accurately. |
| Databáze: | OpenAIRE |
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