Miniature Robust High-Bandwidth Force Sensor with Mechanically Amplified Piezoresistive Readout
| Autor: | Dennis Alveringh, Diana L. Van Der Ven, Henk-Willem Veltkamp, Kevin M. Batenburg, Remco G. P. Sanders, David Fernandez Rivas, Remco J. Wiegerink |
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| Přispěvatelé: | Integrated Devices and Systems, MESA+ Institute, Mesoscale Chemical Systems, TechMed Centre |
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 684-687 STARTPAGE=684;ENDPAGE=687;TITLE=2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) |
| DOI: | 10.1109/mems51670.2022.9699639 |
| Popis: | For fast and accurate force measurements, e.g., sampling the impact of a liquid droplet, a highly sensitive high-bandwidth force sensor is required. High-sensitivity and high-bandwidth are contradictive specifications in recently published force sensors. The miniature force sensor proposed in this paper uses a novel combination of in-plane sensing, mechanical amplification, and piezoresistive readout that overcomes this contradiction. The straight-forward fabrication process consists of three photomasks and uses a single SOI wafer. The sensor has a proven range of 13 mN, a sensitivity of 1.46 /N and a bandwidth of 75 kHz. This is the first force sensor in this force range with such a large bandwidth and has the potential to open up a new field of force sensing where high sampling rates and low ranges are crucial. |
| Databáze: | OpenAIRE |
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