Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
| Autor: | Kyung-Won Jang, Jaehun Jeon, Myeong-Su Ahn, Ki-Hun Jeong |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Silicon Flatness (systems theory) large-area and ultrathin MEMS mirror Bimorph chemistry.chemical_element 02 engineering and technology Nitride 01 natural sciences Optical switch silicon rim microstructures 0103 physical sciences TJ1-1570 Mechanical engineering and machinery Electrical and Electronic Engineering Thin film 010302 applied physics Microelectromechanical systems bimorph thermal actuator business.industry Communication Mechanical Engineering 021001 nanoscience & nanotechnology chemistry Control and Systems Engineering Optoelectronics 0210 nano-technology business Actuator statically actuated MEMS mirror |
| Zdroj: | Micromachines, Vol 12, Iss 754, p 754 (2021) Micromachines |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi12070754 |
| Popis: | A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so that high flatness of the mirror is hardly achieved. Here, we report a MEMS mirror of large-area and ultrathin membrane with high flatness by using the silicon rim microstructure (SRM). The ultrathin MEMS mirror with SRM (SRM-mirror) consists of aluminum (Al) deposited silicon nitride membrane, bimorph actuator, and the SRM. The SRM is simply fabricated underneath the silicon nitride membrane, and thus effectively inhibits the tensile stress relaxation of the membrane. As a result, the membrane has high flatness of 10.6 m−1 film curvature at minimum without any deformation. The electrothermal actuation of the SRM-mirror shows large tilting angles from 15° to −45° depending on the applied DC voltage of 0~4 VDC, preserving high flatness of the tilting membrane. This stable and statically actuated SRM-mirror spurs diverse micro-optic applications such as optical sensing, beam alignment, or optical switching. |
| Databáze: | OpenAIRE |
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