Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires’ Morphology in In Situ TEM

Autor:	Ya Shen, Xuechun Zhao, Ruiling Gong, Eric Ngo, Jean-Luc Maurice, Pere Roca i Cabarrocas, Wanghua Chen
Jazyk:	angličtina
Rok vydání:	2022
Předmět:	electron beam irradiation silicon nanowire growth TEM General Materials Science
Zdroj:	Materials; Volume 15; Issue 15; Pages: 5244
ISSN:	1996-1944
DOI:	10.3390/ma15155244
Popis:	We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 °C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.
Databáze:	OpenAIRE
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