Holed MEM Resonators with High Aspect Ratio, for High Accuracy Frequency Trimming
| Autor: | D. Mercier, J. Bustos, Fabrice Casset, Beatrice Icard, Skandar Basrour, Francois Leverd, Yoan Civet, Jean-Francois Carpentier |
|---|---|
| Přispěvatelé: | Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), STMicroelectronics [Crolles] (ST-CROLLES), Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), Laboratoire d'Electronique et des Technologies de l'Information (CEA-LETI), Université Grenoble Alpes (UGA)-Direction de Recherche Technologique (CEA) (DRT (CEA)) |
| Jazyk: | angličtina |
| Rok vydání: | 2011 |
| Předmět: |
010302 applied physics
Materials science Fabrication Cmos compatibility Acoustics 020208 electrical & electronic engineering 02 engineering and technology 01 natural sciences Compensation (engineering) Resonator CMOS 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Electronic engineering Trimming [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Beam (structure) Coupling coefficient of resonators |
| Zdroj: | Proceedings of the European Solid-State Device Research Conference (ESSDERC'11) European Solid-State Device Research Conference (ESSDERC'11) European Solid-State Device Research Conference (ESSDERC'11), Sep 2011, Helsinki, Finland. pp.123-126, ⟨10.1109/ESSDERC.2011.6044219⟩ |
| DOI: | 10.1109/ESSDERC.2011.6044219⟩ |
| Popis: | International audience; This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|