White light interferometry for surface profiling with a colour CCD
| Autor: | Wang Haifeng, N. Krishna Mohan, U. Paul Kumar, Mahendra P. Kothiyal |
|---|---|
| Rok vydání: | 2012 |
| Předmět: |
Phase-shifting
Fringe analysis Wavelength Color law.invention CCD cameras Optics Data acquisition law Electronic speckle pattern interferometry Scanning Electrical and Electronic Engineering Physics White light interferometry business.industry Mechanical Engineering Astrophysics::Instrumentation and Methods for Astrophysics Laser Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Coherence length Interferometry White-light interferometry White light scanner Single-chip business Surface profiling |
| Zdroj: | Optics and Lasers in Engineering. 50:1084-1088 |
| ISSN: | 0143-8166 |
| DOI: | 10.1016/j.optlaseng.2012.02.002 |
| Popis: | In laser based interferometry, the unambiguous measurement range is limited to half a wavelength. Multiple wavelength or white light interferometer is used to overcome this difficulty. In this paper a white light interferometer with a colour CCD camera is discussed. We access interference intensity information from the three channels of the colour CCD simulating three-wavelength measurement. This makes the data acquisition as simple as in single wavelength interferometry. The unambiguous measurement range however gets limited by the coherence length of the CCD. The usefulness of the proposed method is demonstrated on a micro-sample. � 2012 Elsevier Ltd. All rights reserved. |
| Databáze: | OpenAIRE |
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