Autor: |
J. Joos, F. Mederer, Karl Joachim Ebeling, Heiko J. Unold, C. Jung, Roger King, R. Jager, I. Ecker, P. Schnitzer, Martin Grabherr, M. Kicherer, D. Wiedenmann, Franz Eberhard |
Rok vydání: |
2007 |
Předmět: |
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Zdroj: |
Advances in Solid State Physics ISBN: 9783540415763 |
DOI: |
10.1007/bfb0108383 |
Popis: |
We introduce a new layout for high-bandwidth single-mode selectively oxidized vertical-cavity surface-emitting laser (VCSEL) arrays operating at 980 nm or 850 nm emission wavelength for substrate or epitaxial side emission. Coplanar feeding lines and polyimide passivation are used to reduce electrical parasitics in top-emitting GaAs and bottom-emitting InGaAs VCSELs. In order to enhance fundamental single-mode emission for larger devices of reduced series resistance a surface relief transverse mode filter is employed. Fabricated VCSELs are applied in various interconnect schemes. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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