Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field

Autor:	Hiroaki Nakarai, Tatsuya Yanagida, Kenichi Miyao, Kouichiro Kouge, Tsukasa Hori, Hakaru Mizoguchi, Shinji Nagai, Tamotsu Abe, Saito Takashi, Yoshifumi Ueno, Yukio Watanabe, Hideyuki Hayashi
Rok vydání:	2020
Předmět:	Light source Optics Materials science Polymers and Plastics business.industry Extreme ultraviolet lithography Organic Chemistry Materials Chemistry business Power (physics) Magnetic field
Zdroj:	Journal of Photopolymer Science and Technology. 33:37-44
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.33.37
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::200a4a2d852cc3979d52d83ae1b73915 https://doi.org/10.2494/photopolymer.33.37 Zobrazit plný text záznamu