Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography
| Autor: | George M. Whitesides, Mahiar Hamedi, Luis M. Rubio, Alex Nemiroski, Mathieu Gonidec, Cesar Torres |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Bioengineering 02 engineering and technology 010402 general chemistry 01 natural sciences law.invention Optics Planar law General Materials Science Projection (set theory) Lithography Microlens business.industry Mechanical Engineering Metamaterial General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 0104 chemical sciences Lens (optics) Optoelectronics Photolithography 0210 nano-technology business Microfabrication |
| Zdroj: | Nano Letters. 16:4125-4132 |
| ISSN: | 1530-6992 1530-6984 |
| Popis: | This paper describes a strategy that uses template-directed self-assembly of micrometer-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of "template-encoded microlens projection lithography" (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures with critical dimensions down to ∼400 nm. Each of these structures is defined by local projection lithography with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of nonperiodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior. |
| Databáze: | OpenAIRE |
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